Achievement System
Japanese
EZAKI Hiromi
Department / Course
Tokyo Polytechnic University Faculty of Engineering Department of Engineering - Electrial and Electronics Course
Job
Professor
Academic conference presentation
2005/03/01
Considering the flare by introducing the random aberration and non-conserved aberration (3)
2004/02/01
Random aberration and local flare (3)
2003/02/01
Optical lithography at half the Rayleigh resolution limit by two-photon absorption resist (1)
2002/03/01
Improvement of two-photon absorption lithography (3)