Achievement System
Japanese
SANEKATA Masaomi
Department / Course
Tokyo Polytechnic University Faculty of Engineering Department of Engineering
Job
Associate Professor
Academic conference presentation
2024/07/04
Evaluation of gas rarefaction phenomenon from discharge delay time in deep oscillation magnetron sputtering (The 17th International Symposium on Sputtering & Plasma Processes（ISSP2024）)
2024/07/04
Observation of laser-induced fluorescence in the deposition region of high-power pulsed magnetron sputtering (HPPMS) (The 17th International Symposium on Sputtering & Plasma Processes（ISSP2024）)
2024/07/04
Time-evolution measurements of ion particles formed in high-power pulsed magnetron sputtering using a reflectron-type time-of-flight mass spectrometer (The 17th International Symposium on Sputtering & Plasma Processes（ISSP2024）)
2022/10/05
An optical emission spectroscopic study of deep oscillation magnetron sputtering of titanium (11th International Conference on Reactive Plasmas / 2022 Gaseous Electronics Conference（ICRP-11 / GEC2022）)